<論文>コンピュータグラフィックスによる超拡散原子の連続的な表示モデル(アニメーション) : (1)表面拡敬

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Electron beam dopings are impurity doping processes that impurity sheets are overlaid on the substrate and these surfaces are irradiated by electron beam. In this experiment, an overlayer of Ge sheet was placed on a Si substrate, and the overlayer was irradiated partially by an electron beam of 7 MeV. It was observed by a secondary ion mass spectrometry (SIMS) that displaced atoms in the impurity sheet migrated to its surface and diffused to the unirradiated region. We continued the discussion of further study of the surface diffusion. The animation of a continuous display superdiffusion model by computer graphyics was collectively presented by several continuous elemental processes of superdiffusion atoms in semiconductors.
2003-03-31