Effects of Plasticizing Additives on Performance of l93-nm Chemically Amplified Positive Resists
スポンサーリンク
概要
著者
-
YOSHINO Hiroshi
Tohoku University
-
YOSHINO Hiroshi
Graduate School of Engineering, Tohoku University
-
Yoshino H
Graduate School Of Engineering Tohoku University
関連論文
- 41232 Research and Development of Solar Hot Water Systems and Air-Conditioning/Ventilation Systems for Year-Round Use : Part8: Experiment of New Desiccant Cooling System
- A-15 Experimental Heat and Mass Transport Analysis in Coupled Rotating Sorption and Sensible Wheels
- Numerical Study on Thermal Effects of Cold and High-albedo Surfaces Covered with Snow in Outdoor Environments
- Dissolution Characteristics of Chemically Amplified DUV Resists
- Relationship between Remaining Solvent and Acid Diffusion in Chemically Amplified Deep Ultraviolet Resists
- A Study of Photoacid Structure Dependence on Lithographic Performance in Chemically Amplified Resists
- Application of KrF Excimer Laser Lithography to 256Mb DRAM Fabrication (Special Issue on LSI Memories)
- Synthesized Analyses of Meso-Micro and Indoor Climates : Evalutation on the Spatial Distribution of Wind Potential inside a City for Reducing the Cooling Load of Residential Buildings by means of Cross-ventilation
- A new method to select appropriate countermeasures against heat-island effects according to the regional characteristics of heat balance mechanism
- Effects of Plasticizing Additives on Performance of l93-nm Chemically Amplified Positive Resists
- Photoacid Structure Effects on Environmental Stability of 193 nm Chemically Amplified Positive Resists
- Deblocking Reaction of Chemically Amplified Positive DUV Resists
- Isolation and Properties of Lysine-producing Mutants with Feedback-resistant Aspartokinase Derived from a Brevibacterium flavum Strain with Citrate Synthase- and Pyruvate Kinase-defects and Feedback-resistant Phosphoenolpyruvate Carboxylase(Microbiology &
- Isolation and Properties of Threonine-producing Mutants with both Dihydrodipicolinate Synthase Defect and Feedback-resistant Homoserine Dehydrogenase from Brevibacterium flavum(Microbiology & Fermentation Industry)
- Numerical simulation of flow over topographic features by revised k-ε models
- A study on VOCs Personal Exposure and Cancer Risk Assessment in China
- Summer Survey on Indoor Thermal Environment of Urban Residential Buildings in China
- PASSIVE COOLING IMPACTS WITH THE APPLICATION OF THERMAL MASS AND NIGHTTIME VENTILATION : Evaluation By Experiment Using A Passive Solar Test House And Numerical Analysis
- A Study on Indoor Air Quality of Urban Residential Buildings in China(Environmental Engineering)
- Summer Investigation on indoor Environment of Residential Buildings in Beijing and Other Four Cities(Environmental Engineering)
- Research on the Energy Utilization Structure of Rural Residence in Hunan Province, China(Environmental Engineering)
- Evaluation of turbulent time scale of linear revised κ-ε models based on LES data
- CFD Prediction of Snowdrift around a Cubic Building Model
- Optimization of Tree Canopy Model for CFD Prediction of Wind Environment at Pedestrian Level
- Development of the simulation method for thermal environment and pollutant diffusion in street canyons with subgrid scale obstacles