07-P-04 RF-Sputtered Polycrystalline Si_<0.8>Ge_<0.2> Thin Film for Thermoelectric Hydrogen Sensor
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概要
- 論文の詳細を見る
- 日本セラミックス協会の論文
- 2003-09-29
著者
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TAJIMA Kazuki
National Institute of Advanced Industrial Science and Technology (AIST)
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SHIN Woosuck
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology
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IZU Noriya
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology
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MATSUBARA Ichiro
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology
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MURAYAMA Norimitsu
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology
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QIU Fabin
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology
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TAJIMA Kazuki
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology
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