Temperature-Dependent Optical Properties of Titanium Oxide Thin Films Studied by Spectroscopic Ellipsometry
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概要
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The electron-beam evaporation method was devoted to fabricate anatase-phase TiO<inf>2</inf>thin films on silicon substrate. The optical constants of the thin films determined by spectroscopic ellipsometry in the spectral range from 300 to 800 nm were studied in a temperature range from 293 to 533 K. The refractive indices decrease apparently with increasing temperature, and the thermal expansion and electron--phonon interaction can be introduced to elucidate this phenomenon. The absorption edge in extinction coefficient spectra shows a redshift at elevated temperature, which is attributed to thermally driven band gap shrinkage and electron lifetime loss of optical electron transition.
- 2013-12-25
著者
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ZHANG Fan
Key Lab of All Optical Network & Advanced Telecommunication Network of EMC, Institute of Lightwave T
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Dai Ning
National Laboratory For Infrared Physics Shanghai Institute Of Technical Physics Chinese Academy Of
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Chen Xin
National Asic System Engineering Research Center Southeast University
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Zheng Yu-Xiang
Key Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Wang Zi-Yi
Key Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Zhang Rong-Jun
Key Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Zhang Dong-Xu
Key Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Xu Ji-Ping
Key Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Chen Liang-Yao
Key Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Huang Ren-Zhong
College of Physics Science and Technology, Shenyang Normal University, Shenyang 110034, China
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Sun Yan
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
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Meng Xiang-Jian
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
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Dai Ning
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
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