Electrical and Optical Properties of Index-Matched Transparent Conducting Oxide Layers for Liquid Crystal on Si Projection Displays

スポンサーリンク

概要

• 論文の詳細を見る

• In this study, the characteristics of several kinds of index-matched transparent conducting oxide layers (TCO) were investigated for applications to liquid crystals on silicon (LCoS) projection displays. The purpose of exploring the characteristics of these materials is to find alternatives to currently used index-matched indium-doped tin oxide (ITO) layers, since index-matched ITO suffers from high production costs and materials shortages. Based on zinc oxide (ZnO) TCO layers, metal dopants such as Al, In, or Ga were added to improve the optical and electrical properties; 15 nm thick ZnO, aluminum-doped ZnO (AZO), indium--gallium-doped ZnO (IGZO), indium-doped ZnO (IZO), and gallium-doped ZnO (GZO) layers were sputtered on glass substrates using radio frequency (RF) and direct current (DC) magnetron sputtering. The measured transparency in the visible radiation range was above 94% for all prepared index-matched TCO layers. Among them, the transparency of AZO layers was the highest, reaching 97.5%. The sheet resistance of the TCO layers was around 100 \Omega cm^-2, with 82.6 \Omega cm^-2being the lowest measured value obtained from a 15 nm thick AZO layer. Furthermore, the sheet resistance uniformity measured by samples with an area of 200\times 200 mm²was below 5%. Atomic force microscopy measurement results show that the root-mean-square surface roughness values were lower than 0.01 nm in ZnO and AZO, and 0.128 and 0.261 in IGZO and GZO, respectively. The contact angle, which is another key factor in index-matched TCO-coated substrates, was around 25°, which meets the requirements for LCoS projection display panels. Among the tested TCO layers, AZO exhibited superior characteristics in terms of optical and electrical properties. Therefore, AZO represents an alternative to currently used index-matched ITO layers in LCoS projection displays.

• 2013-06-25

著者

• Choi Bum

  National Center for Nanoprocess and Equipments, Honam Technology Division, Korea Institute of Industrial Technology, Gwangju 500-480, Korea

• Lee Jong

  National Center for Nanoprocess and Equipments, Korea Institute of Industrial Technology, Gwangju 500-480, Korea

• Park Cheol

  National Center for Nanoprocesses and Equipment, Korea Institute of Industrial Technology, Gwangju 500-480, Korea

• Choi Bum

  National Center for Nanoprocesses and Equipment, Korea Institute of Industrial Technology, Gwangju 500-480, Korea

• Choi Bum

  National Center for Nanoprocess and Equipment, Korea Institute of Industrial Technology, Gwangju 500-480, Republic of Korea

• Lee Jong

  National Center for Nanoprocess and Equipment, Korea Institute of Industrial Technology, Gwangju 500-480, Republic of Korea

関連論文

• Analysis of bgl Operon Structure and Characterization of β-Glucosidase from Pectobacterium carotovorum subsp. carotovorum LY34
• Association study of semaphorin 7a (sema7a) polymorphisms with bone mineral density and fracture risk in postmenopausal Korean women
• Evaluation of Metabolic Syndrome Risk in Korean Premenopausal Women : Not Waist Circumference but Visceral Fat
• Toxicological effect of sulfur dioxide on the respiratory tract of rats
• Continuous Synthesis of Carbon Nanotubes Using a Plasma-Enhanced Chemical Vapor Deposition System at Atmospheric Pressure
• Morphological and Electrical Properties of Self-Textured Aluminum-Doped Zinc Oxide Films Prepared by Direct Current Magnetron Sputtering for Application to Amorphous Silicon Solar Cells
• Preparation of Naturally Textured Aluminum-Doped Zinc Oxide Films on Flexible Poly(ether sulfone) Substrate by Radio Frequency Magnetron Sputtering
• Electrical and Optical Properties of Index-Matched Transparent Conducting Oxide Layers for Liquid Crystal on Si Projection Displays
• Carriage of the V279F Homozygous Genotype, a Rare Allele, within the Gene Encoding Lp-PLA2 Leads to Changes in Circulating Intermediate Metabolites in Individuals without Metabolic Syndrome

スポンサーリンク