Fabrication of a Quartz-Crystal-Microbalance/Optical-Waveguide Hybrid Sensor and In situ Evaluation of Vacuum-Evaporated Lead Phthalocyanine Thin Film
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概要
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In this study, we fabricated a novel quartz-crystal-microbalance (QCM)/optical-waveguide hybrid sensor. An in situ observation of a lead phthalocyanine (PbPc) thin-film deposition was conducted during vacuum evaporation, and the effectiveness of the sensor was demonstrated. The film thickness was obtained from the QCM frequency, and the optical absorption of the film was observed by optical waveguide spectroscopy using part of the QCM substrate without the electrode. The film absorption depends on the polarization direction, substrate temperature and deposition rate, owing to aggregate formation. The thickness dependence of the absorption property was also investigated.
- 2013-05-25
著者
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Kaneko Futao
Graduate School Of Science And Technology Niigata University
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Kato Keizo
Graduate School Of Science And Technology Niigata University
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Shinbo Kazunari
Graduate School Of Science And Technology Niigata University
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Ohdaira Yasuo
Graduate School Of Science And Technology Niigata University
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Baba Akira
Center for Transdisciplinary Research and Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan
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Shinbo Kazunari
Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan
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Baba Akira
Center for Transdisciplinary Research, Niigata University, Niigata 950-2181, Japan
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Kaneko Futao
Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan
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Uno Akihiro
Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan
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Hirakawa Ryo
Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan
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KATO Keizo
Graduate School of Science and Technology and Center for Transdisciplinary Research, Niigata University
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Kato Keizo
Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan
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SHINBO Kazunari
Graduate School of Science and Technology and Center for Transdisciplinary Research, Niigata University
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KANEKO Futao
Graduate School of Science and Technology and Center for Transdisciplinary Research, Niigata University
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