Fabrication of 200-nm Dot Pattern on 15-m-Long Polymer Sheet Using Sheet Nanoimprint Method

概要

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Nanoimprint technology is one of the more promising methods for nano-fabrication. The thermal nanoimprint method can fabricate various kinds of thermoplastic materials and its process consists of heating, pressing, cooling, and separation and a lot of research was reported. We proposed and developed a sheet nanoimprint system that enables for continuous treatment of these four basic steps by introducing a belt-shaped nano-mold. We tried to fabricate dot patterns on polymer films by using a sheet nanoimprint method in this work. A 200 nm in diameter and 240 nm tall dots (aspect ratio 1.4) were formed directly onto a 15-m-long polystyrene film. It is important in the field of industrial applications to fabricate nano-scale patterns over a large area with a high throughput. We demonstrated that the sheet nanoimprint is an attractive method for the direct patterning of nano-scale patterns on thermo-plastic films.
2013-03-25