Characterization and Mechanical Properties of Ti--Al--Cr--N Nanocomposite Coatings Deposited by Closed Field Unbalanced Middle Frequency Magnetron Sputtering

概要

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Ti--Al--Cr--N coatings, characterized by a nanocomposite comprising nano-sized TiN crystallites embedded in amorphous AlN or CrN matrix, could be successfully synthesized on Si(111) and WC--Co cemented carbide substrates by a closed field unbalanced middle frequency magnetron sputtering method. The Cr content in the Ti--Al--Cr--N coatings linearly increased from 11.2 to 32.8 at. % raising the Cr targets currents from 5 to 15 A, whereas the Ti content decreased from 63 to 47 at. %. The high resolution transmission electron microscope (HRTEM) image and diffraction patterns clearly show that the Ti--Al--Cr--N coatings were composites of crystallites and amorphous phase, which were distinguished from each other by lattice fringe contrast. The hardness and Young's modulus value of the Ti--Al--Cr--N coatings increased with incorporation of Cr, and had the maximum value of 38.9 and 475 GPa at the Cr content of 17 at. %, respectively. The average friction coefficient of the Ti--Al--Cr--N coatings largely decreased with an increase of the Cr content when compared to the TiN coatings.
2011-12-25