Fabrication of ZnO Films Alloyed with LiGaO2 by RF-Magnetron Sputtering and Their Optical Property

概要

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The alloyed thin films of ZnO with LiGaO2 were fabricated by an rf-magnetron sputtering technique using the target materials with various LiGaO2 concentrations. After optimizing the deposition conditions, such as sputtering atmosphere, applied rf-power and pressure, we successfully obtained almost stoichiometric x(LiGaO2)1/2\Cdot(1-x)ZnO alloyed films. All the obtained films were identified as the simple wurtzite phase. An immiscible region of 0.5 < x < 0.85 was concluded on the basis of a clear discontinuity in the variation of the lattice parameters and energy band gap as a function of the alloying level. For the lower LiGaO2 concentration films, the energy band gap increased with that increasing alloying level and it was widened up to 3.97 eV for x = 0.49, although a significant band gap bowing was observed. The broad absorption in the visible to near-infrared region attributable to the conduction electrons was clearly detected in the transmission spectra of the as-deposited films with 0 \leq x \leq 0.5.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2011-06-25