Preparation and Characterization of (Ba_0.8Sr_0.2)TiO₃--Al₂O₃ Composite Oxide for Thin Film Capacitor

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概要

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• Barium strontium titanate--alumina composites were fabricated using a sol--gel and anodizing process for high performance thin film capacitors and the properties of the films were studied. The (Ba_0.8Sr_0.2)TiO₃ (BST) films were formed by spin coating and subsequent annealing at 150--550 °C. The respective annealed films were anodized in a neutral borate solution. The capacitance density increased with increasing annealing temperature up to 450 °C but decreased at 550 °C. The capacitance density was approximately 28.46% higher with the BST coating than without the BST layer.

• 2011-07-25

著者

• Park Chan

  Division Of Allergy And Respiratory Medicine Department Of Internal Medicine Genome Research Center

• Jang Joo-Hee

  School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea

• Kim Tae-Yoo

  School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea

• Lee Chang-Hyoung

  School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea

• Zhang JingJing

  School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea

• Park Eun-Mi

  School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea

• Suh Su-Jeong

  School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea

• Park Chan

  Division of Materials Science and Engineering, Pukyong National University, Busan 608-739, Republic of Korea

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