Preparation of Pb(Zr,Ti)O3 Thick Film Using a Mixture of Highly Concentrated Sol and Nanopowder Dispersed in Nitric Acid

概要

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A micrometer-thick, dense, and crack-free Pb(Zr,Ti)O3 (PZT) film was fabricated by a single spin coating using a sol–powder composite solution. A transparent PZT powder solution was prepared using dilute nitric acid (HNO3) as a solvent. Ball milling of the nanosized PZT powder with dilute nitric acid produced a transparent powder-dispersed solution with a concentration higher than 0.4 M. The composite solution was prepared by adding nano sized PZT powder partially dissolved in dilute nitric acid to a highly concentrated (${>}1.0$ M), acetic-acid-based PZT sol modified with 1,3-propanediol and polyvinylpyrrolidone. The remanent polarization, coercive field, and relative dielectric constant of the ${\sim}1.0$-μm-thick, single-coated PZT film were 22.6 μC/cm2, 53.6 kV/cm, and 885, respectively, which are comparable to the values obtained from a film of the same thickness prepared by a conventional multi coating method using low-viscosity PZT sol. On the other hand, the PZT film made using sol without a powder solution showed a poor remanent polarization, coercive field, and relative dielectric constant of 6.81 μC/cm2, 86.1 kV/cm, and 144, respectively.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2007-06-15