Contour-Mode AlN Resonator with High Coupling Factor

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概要

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• A micro electro mechanical systems (MEMS) type contour-mode resonator with a high coupling factor of several percent is proposed. The fabricated 60-MHz-band radial-extensional resonators using MEMS process technology of AlN film exhibited a high coupling factor of 2.8% and high $Q$ values of 3000 at the series resonant frequency and 4000 at the parallel resonant frequency. We demonstrated a Pierce type oscillator using the radial-extensional resonators and achieved low power consumption and stable oscillation. These radial-extensional resonators were suitable for filter and oscillator applications because the figure of merit, defined as the ratio of the $Q$ value and the capacitance ratio, was 71 at the series resonant frequency and 94 at the parallel resonant frequency, which were the highest values of the contour-mode AlN resonators.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2010-07-25

著者

• Isobe Atsushi

  Central Research Lab. Hitachi Ltd.

• ASAI Kengo

  Central Research Laboratory, Hitachi Ltd.

• Asai Kengo

  Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan

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• Influence of Underlayer Materials on Preferred Orientations of Sputter-Deposited AlN/Mo Bilayers for Film Bulk Acoustic Wave Resonators
• Contour-Mode AlN Resonator with High Coupling Factor

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