Influence of Underlayer Materials on Preferred Orientations of Sputter-Deposited AlN/Mo Bilayers for Film Bulk Acoustic Wave Resonators
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-12-15
著者
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Isobe Atsushi
Central Research Lab. Hitachi Ltd.
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Asai K
Department Of Quantum Engineering And System Science Graduate School Of Engineering The University O
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MATSUMOTO Hisanori
Central Research Laboratory, Hitachi Ltd.
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ASAI Kengo
Central Research Laboratory, Hitachi Ltd.
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KOBAYASHI Nobuyasu
Hitachi Media Electronics Ltd.
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NAGASHIMA Shiro
Hitachi Media Electronics Ltd.
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SHIBAGAKI Nobuhiko
Central Research Laboratory, Hitachi Ltd.
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HIKITA Mitsutaka
Central Research Laboratory, Hitachi Ltd.
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