Quality Factor of Contour-Mode AlN Resonator (Special Issue : Ultrasonic Electronics)

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概要

• 論文の詳細を見る

著者

• Isobe Atsushi

  Central Research Lab. Hitachi Ltd.

• ASAI Kengo

  Central Research Laboratory, Hitachi Ltd.

関連論文

• Influence of Underlayer Materials on Preferred Orientations of Sputter-Deposited AlN/Mo Bilayers for Film Bulk Acoustic Wave Resonators
• 1.5-GHz SAW Miniature Antenna Duplexer Used in Personal Digital Cellular (Special Issue on Microwave Devices for Mobile Communications)
• Derivation of New Equivalent Circuit for Interdigital Transducers with Leaky SAWs Using Integral Equation Approach
• Quality Factor of Contour-Mode AlN Resonator (Special Issue : Ultrasonic Electronics)
• Influence of Underlayer Materials on Preferred Orientations of Sputter-Deposited AlN/Mo Bilayers for Film Bulk Acoustic Wave Resonators
• Contour-Mode AlN Resonator with High Coupling Factor

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