Dual-Gate Field-Effect Transistor Hydrogen Gas Sensor with Thermal Compensation
スポンサーリンク
概要
- 論文の詳細を見る
We developed a dual-gate field-effect transistor (FET) hydrogen gas sensor for application to hydrogen vehicles. The dual-gate FET hydrogen sensor was integrated with a Pt-gate FET to detect hydrogen and a Ti-gate FET as the reference sensor in the same Si chip. The Ti-FET had the same structure as the Pt-FET except for the gate metal. The Pt-FET showed a good response to hydrogen gas above 10 ppm in air, while the Ti-FET did not show any response to hydrogen gas. The differential output voltage between the Pt-FET and the Ti-FET was stable in the temperature range from room temperature to 80 °C because of the same temperature dependence of the current–voltage ($I$–$V$) characteristics. In addition, the temperature of the integrated hydrogen sensor was controlled by an integrated system consisting of a heater and a thermometer at any given temperature under severe weather conditions.
- 2010-02-25
著者
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國次 真輔
岡山県工業技術センター
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KUNITSUGU Shinsuke
Industrial Technology Center of Okayama Prefecture
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國次 真輔
岡山県工業技術センター 研究開発部
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Tsukada Keiji
The Graduate School Of Natural Science And Technology Okayama University
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Keiji Tsukada
The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushimanaka, Kita-ku, Okayama 700-8530, Japan
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Kariya Masatoshi
The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushimanaka, Kita-ku, Okayama 700-8530, Japan
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Yamaguchi Tomiharu
The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushimanaka, Kita-ku, Okayama 700-8530, Japan
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Toshihiko Kiwa
The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushimanaka, Kita-ku, Okayama 700-8530, Japan
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Hironobu Yamada
The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushimanaka, Kita-ku, Okayama 700-8530, Japan
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Tsuneyoshi Maehara
Phenitec Semiconductor Corp., 6833 Kinoko-cho, Ibara, Okayama 715-8602, Japan
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Tadayoshi Yamamoto
Phenitec Semiconductor Corp., 6833 Kinoko-cho, Ibara, Okayama 715-8602, Japan
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Shinsuke Kunitsugu
Industrial Technology Center of Okayama Prefecture, 5301 Haga, Kita-ku, Okayama 701-1296, Japan
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Tomiharu Yamaguchi
The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushimanaka, Kita-ku, Okayama 700-8530, Japan
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Kunitsugu Shinsuke
The Industrial Technology Center of Okayama Prefecture, Okayama 701-1296, Japan
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