Kinematical Modeling of Pad Profile Variation during Conditioning in Chemical Mechanical Polishing
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概要
- 論文の詳細を見る
Conditioning is the process of removing the glazing area from a polishing pad surface and restoring the quality of the surface to maintain a stable polishing performance. However, the conditioning process can induce a non-uniform profile variation of the pad, which can result in nonuniform material removal rates across the wafer. In this paper, a kinematical model based on Preston’s equation is proposed to examine the pad profile variation (PPV) induced by swing arm conditioning with a diamond disk. The proposed model was simulated with various swing arm velocity profiles (SAVPs), and the results were compared with experimental results. The results showed the relationship between kinematical parameters and the PPV. The PPV was proportional to sliding distance based on the kinematical model, and then the sliding distance distribution across the pad was dependent on the SAVP. This study has proven the effectiveness of the kinematical model on the PPV during conditioning in chemical mechanical polishing (CMP).
- 2009-12-25
著者
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Jeong Haedo
School Of Mechanical Engineering Pusan National University
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Park Kihyun
Department Of Precision Mechanical Engineering Pusan National University
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Jeong Sukhoon
Department of Precision and Mechanical Engineering, Pusan National Univeristy, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Korea
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Lee Sangjik
Department of Precision and Mechanical Engineering, Pusan National Univeristy, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Korea
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Kim Hyoungjae
Dongnam Technology Service Division, Transportation and Machinery Components Technology Service Center, Korea Institute of Industrial Technology, Jisa-dong, Gangseo-gu, Busan 618-230, Korea
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Kim Hyoungjae
Dongnam Technology Service Division, Transportation and Machinery Components Technology Service Center, Jisa-dong, Gangseo-gu, Busan 618-230, Korea
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Park Kihyun
Department of Precision and Mechanical Engineering, Pusan National Univeristy, Jangjeon-dong, Geumjeong-gu, Busan 609-735, Korea
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