Development of Focused Ion Beam Machining Systems for Fabricating Three-Dimensional Structures

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概要

• 論文の詳細を見る

• We designed a focused ion beam (FIB) machining system for fabricating three-dimensional (3-D) micro- and nano-structures. The system used an automatic sample stage that can tilt up to 93°. By tilting the sample stage, a pattern of the bridge width from the top direction and bridge height from the lateral direction is possible for machining 3-D structures. The exact size of the structures is etched by scanning the sample images from the top and lateral views. These etching methods using the first in situ FIB micromachining system showed many advantages for fabricating 3-D structures including transistor configuration.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2008-06-25

著者

• Iwasaki Koji

  Seiko Instruments Inc.

• Kim Sang-Jae

  Department of Mechatronics Engineering and Research Institute of Advanced Technology, Faculty of Engineering, Jeju National University, Jeju 690756, Korea

• Kim Sang-Jae

  Department of Mechatronics Engineering, Cheju National University, 66 Jejudaehagro, Cheju 690-756, Korea

関連論文

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• Development of Focused Ion Beam Machining Systems for Fabricating Three-Dimensional Structures

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