638 Development of focused-ion-beam (FIB) machining systems for fabricating 3-D micro- and nano- structures
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概要
- 論文の詳細を見る
We designed an FIB micro-machining system for making 3-D micro- and nano- structures. The system used an automatic sample stage tilting up to 93° for machining a pattern of bridge width from the top direction and the bridge height from the lateral direction by tilting the sample stage. The exact size of structures was etched by scanning the sample images from the top and lateral view. These etching methods using first in-situ FIB micro-machining system used in this system also showed many advantages for fabricating 3-D structure including tunneling devices.
- 一般社団法人日本機械学会の論文
著者
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YAMASHITA Tsutomu
New Industry Creation Hatchery Center, Tohoku University
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Yamashita Tsutomu
New Industry Creation Hatchery Center Tohoku University
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Kim Sang
National Institute For Material Science (nims)
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Iwasaki Koji
Seiko Instruments Inc.
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Yamashita Tsutomu
New Industry Creation Hatchery Center (niche) Tohoku University
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Kim Sang
National Academy Of Agricultural Science Rural Development Administration
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