Growth of $c$-Axis Epitaxial Thin Films with Reduced Intergrowths for the Bilayer Manganate La2-2xSr1+2xMn2O7 Using a New Sputtering Configuration

概要

論文の詳細を見る
Epitaxial thin films of the bilayer manganate La2-2xSr1+2xMn2O7 (LSMO327) have been grown on SrTiO3(100) substrates by on-axis rf magnetron sputtering with the incorporation of an intermediate plate between the target and the substrate. The plate functions to reduce the bombardment of the growing film by high-energy particles that normally exist during sputtering. It also ensures that the substrate temperature remains unchanged after the opening of the shutter. It is found that the film composition is almost independent of the substrate temperature, which is not observed when the plate is not used. This indicates that the film growth in this new configuration takes place in a mild environment free of the high-energy particles generated during sputtering. With this new configuration, $c$-axis LSMO327 epitaxial thin films with intergrowth contents less than 20% have been successfully grown. This amount of intergrowths is much less than the value of 40% found in films grown using the standard configuration. The new films, when appropriately annealed in O2, have a Curie temperature and a magnetization comparable to those of the bulk. The magnetotransport properties of the films are also reported and discussed.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2008-02-25