Use of Nitrogen Atmospheric Pressure Plasma for Synthesizing Carbon Nitride

概要

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Carbon nitride (CNx) with a high nitrogen content was synthesized using a nitrogen atmospheric pressure plasma. In this method, a reaction space with a high temperature and a high nitrogen content was generated. Under this condition, it was expected that a dense nitrogen radical reacting with a carbon radical would saturate carbon bonds, result in a simultaneous increase in the composition ratio (N/C), and produce a C–N single bond. The N/C ratio of the synthesized CNx reached 1.0, as determined by X-ray photoelectron spectroscopy (XPS) analysis. XPS and FT-IR analyses showed that the synthesized CNx consists of a dominant C–N bond with a C=N bond and a C$\equiv$N bond. The synthesized CNx appeared like a sphere with a diameter of about 100 nm. The optical emission of a CN radical was observed under the CNx growth conditions, and similarities and differences between a nitrogen atmospheric pressure plasma and plasma-enhanced chemical-vapor deposition were determined.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2007-04-15