Frequency-Comb-Based Interference Microscope with a Line-Type Image Sensor
スポンサーリンク
概要
- 論文の詳細を見る
We present a frequency-comb-based interferometric microscope using a broadband comb light source and a line-type image sensor for profilometry and optical tomography. A waveguide-type frequency comb generator and wavelength equalizer were introduced to broaden the comb spectrum. In this paper, we demonstrate the surface profilometry of a coin and the observation of a cross-sectional tomography image of transparent glass. The three-dimensional images were captured using a line-type image sensor without any mechanical moving parts with a frequency interval variation of 25 GHz. The dynamic range in the depth direction was about 1.4 mm and the measurement resolution was 35 μm. The standard deviation of seven thickness measurements was 5 μm.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-10-15
著者
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Shioda Tatsutoshi
Graduate School Of Engineering Tokyo University Of Agriculture And Technology
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Kurokawa Takashi
Graduate School of Education, Hiroshima University
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Tanaka Yosuke
Graduate School Of Engineering Tokyo University Of Agriculture And Technology
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Choi Samuel
Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan
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Kurokawa Takashi
Graduate School of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan
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Shioda Tatsutoshi
Graduate School of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan
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Choi Samuel
Graduate School of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan
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