Monitoring Conditions of Cantilever during Conducting Atomic Force Microscopy Spectroscopy Measurements

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概要

• 論文の詳細を見る

• We report a real-time monitoring system for conducting atomic force microscopy (C-AFM) spectroscopy measurements. This system can capture not only electrical characteristics but also the conditions (torsional displacement and vertical displacement) of the cantilever, which plays the role of the electrodes, simultaneously and can distinguish current fluctuation due to the degradation of test specimens from current fluctuation due to accidental position change. Therefore, this system is suitable for long-term measurements, such as dielectric breakdown (BD) tests on SiO2 gate oxide films. The details of the system and its effectiveness are demonstrated.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-03-15

著者

• Ando Atsushi

  Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan

• Ando Atsushi

  Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan

• Oohira Tsunehiro

  Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan

関連論文

• Tip-to-Sample Distance Dependence of $dC/dZ$ Imaging in Thin Dielectric Film Measurement
• Correlation Between Surface Topography and Static Capacitance Image of Ultrathin SiO2 Films Evaluated by Scanning Capacitance Microscopy
• Monitoring Conditions of Cantilever during Conducting Atomic Force Microscopy Spectroscopy Measurements
• Feedback Control System of Cantilever Contact Conditions during Conducting Atomic Force Microscopy Spectroscopy Measurements

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