Thermal Direct Mastering Using Deep UV Laser
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概要
- 論文の詳細を見る
We report a new mastering technique that utilizes thermal decomposition of a resin; we named this technique thermal direct mastering (TDM). In this method, a multilayer consisting of a Si/ZnO/resin/glass substrate was adopted for the sample. The cover layer consisting of a Si film and a ZnO film had the following two functions: absorption of the laser beam and controlling the bumps of the resin layer. Using a deep UV (DUV) mastering system with a wavelength of 257 nm and a numerical aperture (NA) of 0.90, a monotone pattern corresponding to a 100 GB capacity (areal density: 69.5 Gbit/in.2) disc can be fabricated. In addition, a random pattern with a twofold higher linear density of a Blu-ray Disc (BD) can be fabricated. This random pattern corresponds to a 50 GB capacity (areal density: 34.8 Gbit/in.2) disc.
- 2006-02-15
著者
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Takamori Nobuyuki
Advanced Technology Research Laboratories Corporate R&d Group Sharp Corporation
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Takahashi Akira
Advanced Technology Research Laboratories Corporate R&d Group Sharp Corporation
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Shimo Masanori
Advanced Technology Research Laboratories, Corporate R&D Group, SHARP Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan
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Sakai Toshihiko
Advanced Technology Research Laboratories, Corporate R&D Group, SHARP Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan
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Nakano Ikuo
Advanced Technology Research Laboratories, Corporate R&D Group, SHARP Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan
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