Structures of Anodized Aluminum Oxide Extended-Gate Field-Effect Transistors on pH Sensors

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概要

• 論文の詳細を見る

• The objective of this work is the study and characterization of anodized aluminum oxide as a pH sensor. Sensing films were fabricated by anodic oxidation, a process which is low cost, in which it is simple to manufacture and mass produce films at room temperature, in which it is easy to control the variation in film resistance. The films have a good linear sensitivity, approximately 56 mV/pH from pH 4 to 10 when an instrumentation amplifier is used as the read out circuit. This study indicates that the type of aluminum substrate affects the sensing characteristics. X-ray diffraction (XRD) and scanning electron microscopy (SEM) analysis show that aluminum oxides on different aluminum substrates formed by anodic oxidation have various acid-base characteristics. Extended-gate field-effect transistor (EGFET) sensing films formed when the predominant surface plane of the aluminum oxide is (012) have a linear sensitivity.

• 2006-10-15

著者

• Sun Tai-ping

  Department Of Biology Duke University

• Chin Yuan-lung

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University En

• Chu Yung-Ming

  Department of Electronic Engineering, HuaFan University, Shintin Taipei 223, Taiwan

• Lin Jyh-Ling

  Department of Electronic Engineering, HuaFan University, Shintin Taipei 223, Taiwan

• Hsaio Shih-Hua

  Department of Electronic Engineering, HuaFan University, Shintin Taipei 223, Taiwan

• Chin Yuan-Lung

  Department of Electronic Engineering, HuaFan University, Shintin Taipei 223, Taiwan

• Sun Tai-Ping

  Department of Electrical Engineering, National Chi Nan University, Nantou 545, Taiwan

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