Surface Modification of CdTe Crystal by Plasma Treatment Using Various Gases
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概要
- 論文の詳細を見る
Plasma treatments using various gases have been applied to CdTe(111) surfaces. The induced surface layer composition and morphology were analyzed by X-ray photoelectron spectroscopy and field-emission scanning electron microscopy. He and Ar plasma treatments yielded an approximately stoichiometric surface and morphologies with a pyramidal structure. The surface with the H2 plasma treatment had ball-like particles and was Cd-rich. Furthermore, the surface with the O2 plasma treatment was almost oxidized. An Al/CdTe Schottky contact formed on the surface after the He, Ar, and H2 plasma treatments showed good rectification properties due to elimination of a Te-rich layer.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-09-15
著者
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Higa Akira
Faculty Of Engineering University Of The Ryukyus
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Toguchi Minoru
Faculty Of Engineering University Of The Ryukyus
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NISHIHIRA Atsushi
Faculty of Engineering, University of the Ryukyus
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Toyama Hiroyuki
Faculty Of Engineering University Of The Ryukyus
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Maehama Takehiro
Faculty Of Engineering University Of The Ryukyus
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Ohno Ryoichi
Acrorad Co. Ltd.
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Yamazato Masaaki
Faculty Of Engineering University Of The Ryukyus
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