The Instability of Nitrogen Bonds in Oxygen Incorporated InN1-xOx Films
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概要
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The polycrystalline InN1-xOx films with different oxygen contents were grown by the reactive radio frequency (RF) magnetron sputtering on corning 1737 glass substrates. The chemical composition of each film was measured by the Rutherford back-scattering spectroscopy (RBS). The crystal structure and band gap of each film were examined with X-ray diffraction (XRD) and ultra violet (UV) light transmission spectroscopy, respectively. Results indicated the gradual shift from nitride to oxide as the oxygen incorporation in InN film increased. X-ray absorption spectra identified four possible phases in the film, indium–nitride, indium–oxide, atomic nitrogen and nitrogen–oxygen complex (In–N–O).
- 2005-01-15
著者
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Whang Chung-nam
Institute Of Physics And Applied Physics And Atomic-scale Surface Science Research Center Yonsei Uni
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Noh Myungkeun
Institute Of Physics And Applied Physics And Atomic-scale Surface Science Research Center Yonsei Uni
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Yi Yeonjin
Institute Of Physics And Applied Physics And Atomic-scale Surface Science Research Center Yonsei Uni
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Roh Yongsuk
Institute Of Physics And Applied Physics And Atomic-scale Surface Science Research Center Yonsei Uni
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Cho Sangwan
Institute Of Physics And Applied Physics And Atomic-scale Surface Science Research Center Yonsei Uni
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Jeong Kwangho
Institute Of Physics And Applied Physics And Atomic-scale Surface Science Research Center Yonsei Uni
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Shin Hyun-joon
Pohang Accelerator Laboratory
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Shin Hyun-Joon
Pohang Accelerator Laboratory and Department of Physics, Pohang University of Science and Technology, Pohang 790-784, Korea
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Whang Chung-Nam
Institute of Physics and Applied Physics and Atomic-scale Surface Science Research Center, Yonsei University, Seoul 120-749, Korea
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Noh Myungkeun
Institute of Physics and Applied Physics and Atomic-scale Surface Science Research Center, Yonsei University, Seoul 120-749, Korea
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Yi Yeonjin
Institute of Physics and Applied Physics and Atomic-scale Surface Science Research Center, Yonsei University, Seoul 120-749, Korea
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Jeong Kwangho
Institute of Physics and Applied Physics and Atomic-scale Surface Science Research Center, Yonsei University, Seoul 120-749, Korea
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Roh Yongsuk
Institute of physics and applied physics and Atomic-scale surface science research center, Yonsei University, Seoul 120-749, Korea
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Cho Sangwan
Institute of Physics and Applied Physics and Atomic-scale Surface Science Research Center, Yonsei University, Seoul 120-749, Korea
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