Beam Stability Improvement of a Liquid Metal Ion Source
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概要
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Previous studies on liquid gallium ion sources used an electrochemically etched tungsten wire with a coil-type heater. Such a structure requires excessive power consumption in the course of heating the liquid metal. In this study, a new structure is proposed that replaces the coil-type heater. It uses a gallium reservoir made of six pre-etched 250 μm tungsten wires that surround the needle electrode. Gallium loading at the reservoir is observed to be much more stable, resulting in an improved beam stability.
- 2005-11-15
著者
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HYUN Jeong
Department of Electrophysics, Kwangwoon University
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Yim Youn
Department Of Electrophysics Kwangwoon University
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Seo Yoonho
Department Of Electrophysics Kwangwoon University
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Oh Hyun
Department Of Electrophysics Kwangwoon University
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Choi Eun
Department Of Electrophysics Charged Particle Beam And Plasma Laboratory
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Park Cheol
Department Of Diagnostic Pathology Samsung Medical Center Sungkyunkwan University School Of Medicine
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Kim Seong
Department Of Anesthesiology And Pain Medicine Konkuk University Seoul-hospital
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Kang Seung
Department Of Analytical Research Service International Scientific Standards Ltd. A Battelle Company
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Oh Hyun
Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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Park Cheol
Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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Hyun Jeong
Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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CHOI Eun
Department of Anesthesiology and Pain Medicine, Konkuk University Medical School, Konkuk University Chungju Hospital
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Yim Youn
Department of Electrical Materials Engineering, Wonkwang University, 344-2 Shinyong-dong, Iksan 570-749, Korea
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Kang Seung
Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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Yim Youn
Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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Kim Seong
Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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KIM Seong
Department of Agricultural Chemistry, The University of Tokyo
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