Fabrication of Hybrid $n$-ZnMgO/$n$-ZnO/$ p$-AlGaN/$ p$-GaN Light-Emitting Diodes
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概要
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We report on the fabrication of UV light-emitting diodes (LEDs) based on a $ p$–$n$ junction $n$-ZnMgO/$n$-ZnO/$ p$-AlGaN/$ p$-GaN semiconductor triple-heterostructure. Radio-frequency plasma-assisted molecular beam epitaxy was used to grow the complete heterostructure on $ p$-AlGaN/$ p$-GaN $c$-plane sapphire templates. Cross-sectional transmission electron microscopy showed single-crystal quality of the pseudomorphically grown ZnO active region of the device. The LEDs were fabricated by a process involving both wet and dry etching. Electroluminescence emission most likely associated with ZnO excitonic transition was observed up to 370°C. The results show the potential of ZnO-based materials for UV emitters of potentially lower cost and with comparable or higher emission intensity than comparable AlGaN/GaN devices.
- 2005-10-15
著者
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Chi G.
Department Of Pathology Seoul National University Children's Hospital Seoul National University
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PEARTON S.
Department of Materials Science and Engineering, University of Florida
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Kao C.
Department Of Chemical Engineering National Central University
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Han Sang
Department Of Chemical Engineering Korea Advanced Institute Of Science And Technology
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Chow P.
SVT Associates, Inc., Eden Prairie, MN 55344, U.S.A.
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Yang Hyuck
Department of Materials Science and Engineering, University of Florida, Gainesville, FL 32611, U.S.A.
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Heo Y.
Department of Materials Science and Engineering, University of Florida, Gainesville, FL 32611, U.S.A.
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Baik K.
Department of Materials Science and Engineering, University of Florida, Gainesville, FL 32611, U.S.A.
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Norton D.
Department of Materials Science and Engineering, University of Florida, Gainesville, FL 32611, U.S.A.
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Ren F.
Department of Chemical Engineering, University of Florida, Gainesville, FL 32611, U.S.A.
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Osinsky A.
SVT Associates, Inc., Eden Prairie, MN 55344, U.S.A.
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Dong J.
SVT Associates, Inc., Eden Prairie, MN 55344, U.S.A.
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Hertog B.
SVT Associates, Inc., Eden Prairie, MN 55344, U.S.A.
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Dabiran A.
SVT Associates, Inc., Eden Prairie, MN 55344, U.S.A.
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Chernyak L.
Department of Physics, University of Central Florida, Orlando, FL 32819, U.S.A.
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Steiner T.
AFOSR, Arlington, VA 22203, U.S.A.
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Chi G.
Department of Physics, National Central University, Chung-Li, 32054, Taiwan, R.O.C.
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