Applications of a Novel Microheater in Micromolding

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概要

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• A modified local heating procedure is presented that reduces the sheet resistance of silicon wafers used as heating regions. The temperature-dropping gradient is improved obviously with our novel microheater during micromolding. In comparison with the nonsteady diffusion model, secondary ion mass spectrometry (SIMS) measurements show better agreement of nonsteady diffusion model at high temperature than at low temperature. Fine polymer microstructures can be obtained effectively by our micromolding process using a novel microheater.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-08-15

著者

• Cheng Chao-min

  Institute Of Physics Academia Sinica

• Ho Mon-shu

  Department Of Physics Center Of Nanoscience And Nanotechnology National Chung Hsing University

• Ho Mon-Shu

  Department of Physics, Center of Nanoscience and Nanotechnology, National Chung Hsing University, Taichung 402, Taiwan, R.O.C.

関連論文

• Experimental Determination of Mechanical Properties of Electroformed Ni–Fe Microstructures
• Dynamical Study of Single Silver Atoms on Si(111)-$7 \times 7$ Surfaces
• Applications of a Novel Microheater in Micromolding

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