Optical Imaging of Defect Density Distribution in Ion-Implanted GaAs using Ultrafast Carrier Dynamics
スポンサーリンク
概要
- 論文の詳細を見る
By combining time-resolved pump-probe reflectivity measurements with scanning laser microscopy, we demonstrate microscopic two-dimensional (2D) imaging of defect density distribution on a GaAs surface. The carrier lifetime is significantly reduced by the recombination process through defect states introduced by 5-keV He+ ion implantation. Thus, when plotting the probe beam reflectivity at 1 ps after photoexcitation and scanning the probe beam across the GaAs surface at a spatial resolution of 2 μm with a scanning step of 10 μm, we obtain a clear image of defect distribution corresponding to a mask edge pattern placed on the sample during ion implantation. Clearer images can be obtained using longer wavelength probe light.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2004-01-15
著者
-
Hase Muneaki
Materials Engineering Laboratory National Institute For Materials Science
-
KITAJIMA Masahiro
Materials Engineering Laboratory, National Institute for Materials Science
-
Kannari Fumihiko
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
-
Kitajima Masahiro
Materials Engineering Laboratory, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan
-
Fujii Yasutaka
Department of Electronics and Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
-
Horiuchi Kohei
Department of Electronics and Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
-
Hase Muneaki
Materials Engineering Laboratory, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan
関連論文
- Suppressiom of Chaotic Oscillations in a Diode-Pumped Microchip Laser with Frequency-Shifted Optical Feedback
- Synchronization of Chaos in Two Microchip Lasers : Comparison between Two Master-Slave Types and a Mutually-Coupled Type
- Formation Mechanism of Interstitial Hydrogen Molecules in Crystalline Silicon
- Adaptive Pulse Shaping of Femtosecond Laser Pulses in Amplitude and Phase through a Single-Mode Fiber by Referring to Frequency-Resolved Optical Gating Patterns(Optics and Quantum Electronics)
- Accurate Pulse Shaping of Femtosecond Lasers Using Programmable Phase-Only Modulator
- Influence of Polarization and Pulse Shape of Femtosecond Initial Laser Pulses on Spectral Broadening in Microstructure Fibers
- Self-Injection-Locked, Narrow-Linewidth, Flashlamp-Pumped Ti:Al_2O_3 Laser
- Hundredjoule-Level KrF Lasers Excited Longitudinally by an Intense Electron Beam
- Development of Multihundredjoule HF (H_2/SF_6) Chemical Lasers Initiated by Intense Electron Beams
- Spatial Phase Information Transmission through Single-Mode Fibers by Coherence Function Shaping of Low Coherent Light
- Thermoelectric Thick-Film Hydrogen Gas Sensor Operating at Room Temperature : Electrical Properties of Condensed Matter
- Coherent Control of the Polarization of Ultrashort Optical Pulses Using Electromagnetically Induced Transparency
- Two-wave mixing amplification of femtosecond laser pulses at 800 nm in Rh:BaTiO3 photorefractive crystal
- Passive Q-Switching of a Flashlamp-Pumped Ti:Sapphire Laser with a Stimulated Brillouin Scattering Nonlinear Mirror
- Grating Formation in Fe:LiNbO_3 Photorefractive Crystal by Chirped 800-nm Femtosecond Laser Pulses Operated at 1kHz
- Correlation of Matched Electric Fields in Four-Level Atoms via Electromagnetically Induced Transparency
- Dual-Wavelength Operation of a Flashlamp Pumped Narrow-Linewidth Ti:Sapphire Laser
- Spectral-Shape-Controllable Supercontinuum Generation in Microstructured Fibers Using Adaptive Pulse Shaping Technique
- Theoretical Study of Subpicosecond Pulse Amplification in XeF(C-A)
- Two-Dimensional Optical Data Transmission with Space-Time Conversion Combined with Code Division Multiple Access
- Picosecond VUV Pulse Generation by Dual-Wavelength-Pumped Raman Shifting
- Material Survey for a Novel Beam Splitter Separating High-Order Harmonics from High-Average-Power Fundamental Pulses
- Formation Mechanism of Interstitial Hydrogen Molecules in Crystalline Silicon
- Purification of Squeezed Vacuum Pulse Generated from a Sagnac Loop Fiber Using Linear Optics and Conditional Homodyne Detection
- Optical Imaging of Defect Density Distribution in Ion-Implanted GaAs using Ultrafast Carrier Dynamics
- Fiber Delivery of Ultrashort Optical Pulses Preshaped on the Basis of a Backward Propagation Solver
- Feedback Control for Accurate Shaping of Ultrashort Optical Pulses prior to Chirped Pulse Amplification
- Cr
- Design of Frequency-Domain Filters for Femtosecond Pulse Shaping
- Reduction of Timing Jitter with Active Control in a kHz Regenerative Amplifier of Femtosecond Pulse Ti:Al2O3 Laser
- Spectrum-Holographic Formation of Fine Etching Patterns on a Silicon Surface with Pulse-Shaped Femtosecond Laser Pulses
- Numerical Analysis of Amplitude-to-Phase Noise Conversion in a Self-Referencing Scheme Using Ultrashort White-Continuum Light Generated by Microstructure Fibers
- Cr^-Doped Y_3Al_5O_ as a Saturable Absorber for a Q-Switched and Mode-Locked 639-nm Pr^-Doped LiYF_4 Laser