Spectrum-Holographic Formation of Fine Etching Patterns on a Silicon Surface with Pulse-Shaped Femtosecond Laser Pulses
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概要
- 論文の詳細を見る
We demonstrate a novel method of material processing to create flexible periodic structures using temporal pulse shaping of ultrashort laser pulses and spectral interferometry. This scheme is based on the idea that the interferometric fringe pattern at a Fourier spectral plane can be varied by programming temporal amplitude, relative phase and the interval of two collinearly incident pulses. Various periodical patterns are formed on a silicon surface located at the Fourier plane with laser ablation.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-09-15
著者
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Tanabe Takasumi
Department Of Electronics And Electrical Engineering Faculty Of Science And Technologies Keio Univer
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Kannari Fumihiko
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Tanabe Takasumi
Department of Electronics and Electrical Engineering, Faculty of Science and Technologies, Keio University, 3-14-1, Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
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Okamoto Tatsuyoshi
Department of Electronics and Electrical Engineering, Faculty of Science and Technologies, Keio University, 3-14-1, Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
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