Accurate Double-Height Micromolding Method for Three-Dimensional PolyDiMethylSiloxane Structures

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概要

• 論文の詳細を見る

• A fabrication method for making accurate double-height micromolds is presented. Fine features of the micromold are transferred to a three-dimensional poly-dimethylsiloxane (PDMS) microfluidic membrane. The accuracy of features is within 1.55% and the maximum aspect ratio is 7. In this work, the first layer of the micromolds is made directly on silicon wafers by inductively coupled plasma reactive ion etching (ICP-RIE). The second layer is added by photolithography of SU-8 negative photoresist on top of the first layer. This method allows the fabrication of micromolds having wall dimensions as small as 3 μm that was not previously achievable. Such dimensions are required in biological microfluidic systems to reduce the amount of chemicals or to confine cells to a desired position.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-07-15

著者

• Toshiyoshi Hiroshi

  Limms/cnrs-iis University Of Tokyo

• Fujita Hiroyuki

  Limms Cnrs-iis University Of Tokyo

• Griscom Laurent

  BIOMIS, ENS de Cachan Antenne de Bretagne, Campus de Ker-lann, BRUZ 35170, France

• Fujita Hiroyuki

  LIMMS/CNRS-IIS, University of Tokyo 4-6-1, Komaba, Meguro-Ku, Tokyo 153-8505, Japan

• Denoual Matthieu

  LIMMS/CNRS-IIS, University of Tokyo 4-6-1, Komaba, Meguro-Ku, Tokyo 153-8505, Japan

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• Towards Mechanical Characterization of Biomolecules by MNEMS Tools
• Cell Placement and Neural Guidance Using a Three-Dimensional Microfluidic Array : Instrumentation, Measurement, and Fabrication Technology
• Integration of Microoptics in Bio-Micro-Electro-Mechanical Systems towards Micro-Total-Analysis Systems
• Accurate Double-Height Micromolding Method for Three-Dimensional PolyDiMethylSiloxane Structures

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