Surface-Acoustic-Wave Delay Line at 24 GHz Using the Guided Rayleigh Mode in AlN/SiC Structures
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概要
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The propagation of a surface acoustic wave (SAW) between interdigital transducers is demonstrated at a frequency of ${\sim}24$ GHz. The elevated-order guided Rayleigh modes in AlN/SiC(0001) structures have a velocity as high as that of the transverse bulk sound wave in SiC with a polarization parallel to the $c$-axis. The significantly high frequency is accomplished at the SAW wavelength of 300 nm by adjusting the overlayer thickness to be about the threshold thickness for the second-order Rayleigh mode in order to maximally benefit from the SAW velocity.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-04-15
著者
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Brandt Oliver
Paul Drude Institute For Solid State Electronics
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Takagaki Yukihiko
Paul Drude Institute For Solid State Electronics
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Ploog Klaus
Paul Drude Institute
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Brandt Oliver
Paul Drude Institute for Solid State Electronics, Hausvogteiplatz 5-7, Berlin 10117, Germany
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