Improvement of Alkali Durability of Silver-Based Multilayer Coatings for Use in Flat Panel Displays

概要

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Silver-based multilayer coatings are well known to be transparent films with low electrical resistivity. In particular, indium and zinc composite oxide (IZO)/silver containing palladium (AgPd) multilayer coatings have good pattering properties and durability. However, the IZO/AgPd multilayer coatings do not have sufficient alkali durability as transparent electrodes of flat panel displays (FPDs). In order to solve this problem, coatings covered with a protective layer of tin-doped indium oxide (ITO) were investigated. Over-coating of an ITO layer degraded the patterning properties of the multilayer coatings because the etching rates of ITO, IZO and AgPd layer were very different. From the viewpoint of controlling the etching rate of each layer independently, the etching solution composed of hydrobromic acid and iron chloride was adjusted, so that the ITO/IZO/AgPd/IZO/AgPd/IZO/substrate multilayer coatings could be fabricated into fine patterns for electrodes. The multilayer coatings thus prepared are more tolerable for alkali detergents used in the production process of FPDs.
Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
2001-06-15