Leakage Current and Fatigue Properties of Pb(Zr, Ti)O3 Ferroelectric Films Prepared by RF-Magnetron Sputtering on Textured LaNiO3 Electrode

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The leakage current and the fatigue properties of Pb(Zr, Ti)O3 (PZT) films prepared by rf-magnetron sputtering on (100)-textured LaNiO3 electrode were investigated. Sputtering parameters such as excess PbO content in the target, sputtering power, Ar/O2 ratio, and working pressure were studied. PZT films of the perovskite phase with (100)-preferred orientation can be easily obtained under our sputtering conditions. The optimal sputtering conditions are: 30% excess PbO, sputtering power 40 W, working pressure 5 mTorr, and $\text{Ar/O}_{2}=95/5$. The effect of these sputtering parameters on leakage current and fatigue properties can be explained by the variation of the concentrations of lead vacancies and holes produced by the sputtering conditions. PZT films deposited under these optimal conditions can endure fatigue up to more than $10^{11}$ cycles and possess a low leakage current density ($10^{-8}\text{--}10^{-7}$ A/cm2) at an electric field strength lower than 100 kV/cm. The conduction mechanism of the leakage is proposed to be a Schottky thermionic emission.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
2001-04-15