Effect of Reducing Atmosphere on Electrical Properties of Sol-Gel-Derived Pb(Zr,Ti)O_3 Ferroelectric Films On Textured LaNiO_3 Electrode : Surfaces, Interfaces, and Films
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概要
- 論文の詳細を見る
Reducing-atmosphere treatment at 400℃ for 10 min was performed on sol-gel-derived Pb(Zr,Ti)O_3 (PZT) thin films, which were spin-coated on a LaNiO_3/Pt/Ti/SiO_2/Si substrate and annealed. The reducing atmosphere does not produce any significant change of the preferred orientation perovskite structure of these ferroelectric thin films. However, the relative dielectric constant and the remanent polarization of the PZT films decrease signiflcantly with the reducing-atmosphere treatment. In addition, the endurance of electrical signal cycling is also decreased by the reducing atmosphere treatment. On the other hand, the leakage currents of the reducing-atmosphere-treated PZT films are decreased by about one order of magnitude.
- 社団法人応用物理学会の論文
- 2001-10-15
著者
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Wu Jenn-ming
Department Of Materials Science And Engineering National Tsing Hua University
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Chao G‐c
National Tsing Hua Univ. Hsinchu Twn
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Chao Gwo-chin
Department Of Materials Science And Engineering National Tsing Hua University
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