Bending of a Rectangular Cantilever of an Atomic Force Microscope as a Function of Position along Length
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概要
- 論文の詳細を見る
In order to measure quantitatively the surface stress change of a cantilever for an atomic force microscope, we studied the bending of a rectangular cantilever pushed ca. 50 nm against a hard surface as a function of the laser spot position on the cantilever and compared the result with the bending caused by the surface stress change.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1997-08-15
著者
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Fujihira Masamichi
Department Of Biomolecular Engineering Tokyo Institute Of Technology
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Miyatani Tatsuya
Department Of Biomolecular Engineering Tokyo Institute Of Technology
-
Fujihira Masamichi
Department of Biomolecular Engineering, Tokyo Institute of Technology,
-
Miyatani Tatsuya
Department of Biomolecular Engineering, Tokyo Institute of Technology,
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