Three Dimensional Optical Emission Tomography of an Inductively Coupled Plasma

スポンサーリンク

概要

• 論文の詳細を見る

• The three dimensional distribution of the net production rate of excited species in an inductively coupled plasma (ICP) reactor in Ar has been measured as a function of pressure and discharge power. The ICP reactor is driven by a single turn radio-frequency current coil at 13.56 MHz. Robot assisted optical emission tomography was used in order to obtain radial profiles of emission at different distances from the coil thus giving effectively a three dimensional distribution of the net excitation rate as well as the number density of excited states. Under some conditions azimuthal symmetry of the discharge is broken mostly at higher pressures and higher powers. We have covered a range of pressures between 15 and 500 mTorr and powers between 50 W and 400 W. The conditions for producing a uniform distribution of excited atoms as a representative of active species, are discussed.

• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1997-07-30

著者

• Nakano Nobuhiko

  Faculty Of Science And Technology Department Of Electrical Engineering Keio University

• Makabe Toshiaki

  Faculty Of Science And Technology Department Of Electrical Engineering Keio University

• Petrovic Zoran

  Faculty Of Ee University Of Belgrade

• Okigawa Akifumi

  Faculty Of Science And Technology Department Of Electrical Engineering Keio University

• Itoh Akihiko

  Shibaura Engineering Works Co. Ltd.

• Tadokoro Masahiro

  Faculty of Science and Technology, Department of Electrical Engineering, Keio University, Yokohama 223, Japan

• Makabe Toshiaki

  Faculty of Science and Technology, Department of Electrical Engineering, Keio University, Yokohama 223, Japan

• Petrović Zoran

  Faculty of Science and Technology, Department of Electrical Engineering, Keio University, Yokohama 223, Japan

• Okigawa Akifumi

  Faculty of Science and Technology, Department of Electrical Engineering, Keio University, Yokohama 223, Japan

関連論文

• Three Dimensional Optical Emission Tomography of an Inductively Coupled Plasma
• Robot Assisted Optical Emission Tomography in an Inductively Coupled Plasma Reactor
• Drift Velocities of Electrons in Time Varying Electric Fields
• Effect of Surface Material on Spatiotemporal Structure in O_2 RF Glow Discharge
• Multiple-collision zones in the Sanjiang Region, SW China
• The Radical Transport in the Narrow-Gap-Reactive-Ion Etcher in SF_6 by the Relaxation Continuum Model
• An Efficient Model for Performance Analysis of the Dual Banyan Switch under Uniform and Non-uniform Traffics
• A Novel Sustaining Mechanism in Capacitively Coupled Radio Frequency Plasma in Oxygen
• A novel sustaining mechanism in capacitively coupled radiofrequency plasma
• Three Dimensional Optical Emission Tomography of an Inductively Coupled Plasma

スポンサーリンク