Properties of High-Quality Flexible Graphite Film and Its Preparation by the Pyrolytic CVD Method
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概要
- 論文の詳細を見る
Pyrolytic chemical vapor deposition (CVD) of hydrocarbon containing oxygen atoms yields free-standing conductive carbonaceous films of 450 S/cm. With further heat-treating at a higher temperature, the obtained film is converted to high quality graphitized film with a conductivity of $1.6\times 10^{4}$ S/cm for the 2800°C treatment, which is of the same order of magnitude as that of highly oriented pyrolytic graphite (HOPG). The electrical conductivity and thermoelectric power of the films are examined as a function of the heat-treatment temperature. The temperature dependence of thermoelectric power is also confirmed to be the same as that of HOPG.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-01-20
著者
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Fukuda Masahiko
Central Research Laboratories Idemitsu Kosan Co. Ltd.
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Yoshino Katsumi
Faculty Of Engineering Of Osaka University
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Fukuda Masahiko
Central Research Laboratories, Idemitsu Kosan Co. Ltd., 1280 Kamiizumi Sodegaura Kimitsu-Gun, Chiba 299-02
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Mizogami Shigeyoshi
Central Research Laboratories, Idemitsu Kosan Co. Ltd., 1280 Kamiizumi Sodegaura Kimitsu-Gun, Chiba 299-02
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