Infrared Attenuated Total Reflection by Chemomechanically Polished (0001) Surface of 6H-SiC
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概要
- 論文の詳細を見る
The Si-terminated (0001) surface having a roughness of 0.5 nm, which is obtained by polishing with Cr2O3 abrasive, of 6H-SiC crystals has been examined by the infrared attenuated total reflection spectroscopy. Clear resonance attenuation is observed due to surface phonon-polariton waves propagating in the surface. Additional resonances due to the surface waves and longitudinal-optical (LO) phonons are found to be induced by the surface roughness through the elastic scattering process. It turns out from these observations that the subsurface SiC lattices retain the 6H polytypism well.
- Japan Society of Applied Physicsの論文
- 2003-10-15
著者
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Kuroda Noritaka
Department Of Materials Science And Engineering Graduate School Of Science And Technology Kumamoto U
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Iida Youhei
Department Of Mechanical Engineering And Materials Science Faculty Of Engineering Kumamoto Universit
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Shigeta Takashi
Department Of Mechanical Engineering And Materials Science Faculty Of Engineering Kumamoto Universit
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Watanabe Junji
Department Of Applied Chemistry Graduate School Of Engineering Osaka University
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Shigeta Takashi
Department of Mechanical Engineering and Materials Science, Faculty of Engineering, Kumamoto University, Kumamoto 860-8555, Japan
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Iida Youhei
Department of Mechanical Engineering and Materials Science, Faculty of Engineering, Kumamoto University, Kumamoto 860-8555, Japan
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