Substantial Pinning of the Fermi Level of Plasma-Treated n-Type GaN Surfaces
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概要
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The Schottky barrier height of plasma-treated n-type GaN was investigated according to the work functions of metals including Cu, Au, and Pt. The extracted $S$-parameter was as low as 0.17, and the density of surface states was as high as $5.4\times 10^{13}$ states/(cm2$\cdot$eV), indicating substantial pinning of the Fermi level on plasma-treated n-type GaN surfaces.
- 2011-01-25
著者
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Kim Hyunsoo
School Of Mechanical Engineering Sungkyunkwan University
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Park Youngjun
School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University, Jeonju 561-756, Korea
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