Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems
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概要
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This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O<SUB>3</SUB> (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.
著者
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Tanaka Katsuhiro
Department Of Breast And Thyroid Surgery Kawasaki Medical School
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Hara Motoaki
Department of Electronic & Electrical Engineering, Kanagawa Institute of Technology
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Kuwano Hiroki
Department Of Nano-mechanics Faculty Of Engineering Tohoku University
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Ishikawa Shinya
Department Of Electrical Engineering Faculty Of Engineering Doshisha University
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Nagasawa Sumito
Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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TANAKA Katsuhiro
Department of Nanomechanics Graduate School of Engineering, Tohoku University
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SUITA Kenji
Department of Nanomechanics Graduate School of Engineering, Tohoku University
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NAGASAWA Sumito
Department of Nanomechanics Graduate School of Engineering, Tohoku University
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