Spurious Suppression without Energy Dissipation in Aluminum--Nitride-Based Thin-Film Bulk Acoustic Resonator Using Thin Ring on Electrode Edge
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概要
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We examined the suppression of spurious responses beneath the resonant frequency in an aluminum-nitride-based thin-film bulk acoustic resonator (FBAR) by a two-dimensional (2D) finite element method (FEM) and dispersion analysis of waves. The results confirmed that the 0th-order asymmetric mode (A_{0} mode) influences the resonance characteristics. As a result of these findings, we propose a structure having a thin ring on the electrode edge to take advantage of this A_{0} mode in suppressing spurious responses.
- 2012-07-25
著者
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Hara Motoaki
Department of Electronic & Electrical Engineering, Kanagawa Institute of Technology
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Kuwano Hiroki
Department Of Nano-mechanics Faculty Of Engineering Tohoku University
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Kuwano Hiroki
Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Hara Motoaki
Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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