Micro-Energy Harvesters Integrated with a Quatrefoil-Shaped Proof Mass Suspended by Multiple (K,Na)NbO
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概要
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In this study, we developed an energy harvester with a multibeam structure employing a (K,Na)NbO<inf>3</inf>(KNN) thin film. The harvester had a quatrefoil-shaped proof mass suspended by four KNN beams and was completely fabricated by micromachining technologies. The harvester was designed to obtain high nonlinearity. As a result, the fractional bandwidth of operable frequency was widened by more than 40% when the acceleration was 15 m/s<sup>2</sup>. The maximum harvested power of 640 nW was obtained at the resonant frequency of 1412 Hz.
- 2013-07-25
著者
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Hara Motoaki
Department of Electronic & Electrical Engineering, Kanagawa Institute of Technology
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Kuwano Hiroki
Department Of Nano-mechanics Faculty Of Engineering Tohoku University
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Minh Le
Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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