反応性DCスパッタリングによるTi-6Al-4V合金へのTi-O被覆に及ぼす酸素流量の影響

概要

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In order to improve the biocompatibility of Ti-6Al-4V alloy, Ti-O coatings formed thereon by reactive DC sputtering in Ar-O2 mixtures, the oxygen contents of which were regulated by mixing the desired amount of oxygen into a constant flow of argon, were examined and the effects of oxygen flow rates were discussed. Under visual observation, all Ti-O coatings obtained appeared to exhibit good uniformity and adhesion, but under SEM their surfaces were found to have a duplex microstructure of fine particles dispersed on a smooth accumulated deposit. The Vickers hardness of the film increased almost linearly with increasing oxygen flow rate, and maximum hardness was more than Hv 1600. Under AES, the Ti/O ratio in the depth direction was nearly constant for all films, and their oxygen contents increased with increasing oxygen flow rate. Based on the results of X-ray diffraction, it was concluded that at lower oxygen flow rates, oxygen atoms dissolved into α-titanium crystals, while at higher rates suboxides such as Ti4O7 and Ti6O11, and oxides such as TiO2 (anatase) were formed.
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