粗引きに油拡散ポンプを用いた超高真空系の残留炭化水素分析

概要

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Analysis was made of residual hydrocarbons in an ultra-high vacuum system with an oil diffusion pump as a roughing means. The system was intermittently pumped by an oil diffusion pump and variation in hydrocarbon mass peaks was measured using a quadrupole mass filter. The most characteristic groups of mass peaks which suggest oil contamination were the C3Hm, C4Hm and C5Hm groups. In the present system, partial pressures of hydrocarbons larger than the C3Hm groups increased with total pumping time until the pressures reached some saturated values. The rate of contamination of a surface exposed in the system was estimated on the assumption that the condensation coefficient of all hydrocarbon molecules was unity.
日本真空協会の論文