電子ビーム照射によって生じた重合膜の観察

概要

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A polymerized contamination film is studied which is formed on a glass surface placed in organic gases under the irradiation of electron beams. Polymerizing rate were evaluated for vacuum sealing greases and diffusion pump fluids which may be used as a lubricant.<BR>Organic materials were loaded in clean chamber and an electron beam from the electron gun was allowed to impinge upon a specime n which is adsorbed on a silver-coated glass target. The thickness of polymerized films was measured by a multi-beam interferometer whose thickness was yarned with densty of the electron beam.<BR>All the diffusion pump fluids tested were responsible for polymerized contamination to a considerable extent and the silicon grease glealy. While the grease of Apiezon-M and Apiezon-L were barely responsible for the contamination in spite of irradiation time prolonged.
日本真空協会の論文