真空高温熱処理 (1050℃) されたSUS304板表面の微細構造と元素分布

概要

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Microstructure and elemental features of three kinds of SUS304 surfaces (1050°-C fired, 950°-C fired, and as received) were investigated using a scanning electron microscope and a scanning Auger microprobe. The grain boundaries of the 1050°-C fired surface were vague and shallow due to elemental diffusion at high temperature. The oxide layer of the 1050°-C fired surface was thinner, and could be said to be finer in microstructure than those of the other surfaces. A vacuum-fired (vacuum-brazed, 1050°C) stainless steel (SUS304) chamber was evacuated by a sputterion pump. An extremely high vacuum of 1.5×10<SUP>-9</SUP> Pa (N<SUB>2</SUB> equivalent) was measured after mild baking (170°C) following air exposure. Vacuum-firing pretreatment has the efficient effects of degassing the gas molecules in the interior of the stainless steel walls and of removing the thick oxide layers of their surfaces.