電子顕微鏡排気系の改良

概要

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Results obtained from analyzing gas and measuring the amount of outgassing showed that in the case of untreated film, the amount of outgassing from 24 films was in the order of 10-3 Torr·l·sec-1several hours after evacuation and, further, that the main gas component of the film inserted into the camera chamber was water vapor. Another preliminary experiment showed that the holes and pipes between the specimen chamber and viewing chamber were so small that, in the case of differential pumping, the vacuum degree in the specimen chamber and gun chamer was hardly dependent on the vacuum degree in the viewing chamber. The new pumping system for the JEM-100B Electron Microscope is provided with a liquid nitrogen trap at the junction of the main pumping line and the line from the viewing chamber. Owing to this vacuum system, the vacuum degree in the specimen chamber and gun chamber reached the lower 10-6 Torr region.