ソープションポンプの動作特性
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概要
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In order to clarify the best performance of sorption pump using molecular sieves, we compared the sorption rate and the sorption capacity of molecular sieves type 4A, 5A and 13X, silica gel and activated carbon respectively under the condition that the sorption pump is operated usually. Also, the pump being combined with Vaclon pump the pump, down characteristics were examined.<BR>The results obtained in these experiments are as follows;<BR>1) Molecular sieves type 5A is most suitable as sorption material for practical use among other kind of molecular sieves, activated carbon and silica gel.<BR>2) Gas adsorption amount of type 5A is greatest among molecular sieves type 5A, 13X and 4A as to the gas sorption capacity, but the stability of pump down cycling is considerably inferior to type 13X.<BR>3) The vapors of organic solvents are considered to be condensed preferentially on the sorption material independent of its pore diameter, because of their high boiling point comparing with the liquid nitrogen temperature.<BR>4) Combination of sorption pump with Vaclon pump attained the vacuum of 2×10<SUP>-10</SUP> mmHg from atmospheric pressure without any troubles.
- 日本真空協会の論文
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